A rotary vane vacuum pump is an oil sealed rotary displacement pump. Oil diffusion vacuum pump ulk series ulvacs diffusion pumps ulk series have been developed not only for superior performance, but also for extremely low operating cost. They are chemically inert, exhibit a high flash point and the evaporation heat is low. Even as turbomolecular vacuum pumps have displaced most small laboratory sized oil diffusion pumps these days because of perceived ease of use and cleanliness, most high vacuum heat treating furnaces still rely on a large oil diffusion pumps to generate the pressures below about 103 torr needed for many metal conditioning processes. Yet oil diffusion pumps require careful maintenance in order to sustain a high level of performance and maintain the integrity of the vacuum chamber. Additionally, furnace operators need shorter cycle times to accomplish efficient processing of heattreated material batches. Instead, an ancillary mechanical roughing pump or forepump, capable of a modest level of pumping, first brings the pressure inside the vacuum diffusion chamber down to about 103 torr. Backstreaming is the migration of minute levels of oil that move in the opposite direction toward the inlet of the pump and into the process stream, which may be the stage of. Ulvac has drawn on a wealth of experience in evacuation technology to redesign the ulk series of oil diffusion pumps to meet the demands of a new era. When the oil becomes hot enough to vaporize, the oil vapors rise up the center of the pump and exit the nozzles at a downward angle. Mar 08, 2007 oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable and very durable. Make offer cvc bendix vmf10 oil diffusion high vacuum pump 12. As for the largesized type, contact from dpf14 to the our companys sales and give. Surface tension of the pump fluids must be high to reduce creep of oil films.
Diffusion pumps differ from conventional mechanical pumps in that they use a high speed jet of fluid to direct gas molecules in the pump throat down to the bottom. Mineral oils leybonol lvo 500 and lvo 510 for diffusion pumps are closely toleranced fractions of a high quality base product distilled with particular care. Oil for diffusion and ejector pumps ulvoil d series d. Hlt20 is designed to meet the performance curves of speed and throughput of todays modern oil diffusion pumps. Mt705 diffusion pump fluid is a colorless to light straw, a single component for ultrahigh vacua in the range of 10e9 to 10e10 torr untrapped and 10e11 torr trapped. Oil diffusion pumps remain in popular use in the vacuum heat treating industry, possibly one of the few applications remaining for this type of high vacuum pump in the western world. Silicone based diffusion pump oil 1 gallon, same as dc704.
The pumping speed ranges from 2,400 ls to 33,000 ls and has a operating range of 101 to 107 mbar more. Oil diffusion pumps from welch are used to generate a high and ultrahigh vacuum up to a pressure range of 5x107 mbar with an extremely high pumping speed. Maintenance and troubleshooting of oil diffusion pumps. Compared to hydrocarbons organic oils, the hsgroup silicone diffusion pump oil oi808 is remarkably favorable due to the very narrow molecular weight distribution. Unable to complete action, likely due to connectivity to dows back end service. Diffusion pump working principle diffusion pump oil by. Here in my country side there are a lot of silicone base oil to which i can use as a low vapor pressure oil, but think is i really dont know which staff has to this purpose. Ideal vacuum diffusion pump oils, vacuum fluids, oils. Diffusion pump forelineconnection point to the roughing pump system pump heater electrical connection box oil level sight glass cooling water inlet connections copper cooling water coils proper cooling water flow is essential.
Select the optimal oil for your pump needs from our specialized lineup. Dij oil diffusion pumps are wearfree high vacuum pumps without wearing and moving components. The very bottom of the chamber is a heater where siliconebased diffusion pump oil is heated until it reaches gaseous state, usually between 180 270c. Using silicone based oil, there is little or no maintenance required, just several things. At the bottom, you can see the heaters that sit just below the oil. Our leybonol pumping fluids fulfil the requirements for working in a high vacuum. Vapor diffusion pumps were first conceived about 191516, and used mercury as the pumping fluid. Oil vapour diffusion pumps vapour pumps for industrial applications edwards has long been a pioneer of vapour pumps and diffusion pump technology with innovations such as the diffusion pump cold cap and the combined diffusion pump, the diffstak. The vapor pressure and backstreaming rate of dow corning 705 diffusion pump fluid are so low that use of traps or refrigeration is unnecessary for some. Please note that to operate an oil diffusion pump it is mandatory to connect a backing pump. Inlet nozzle water cooling pipe pump body outlet boiler features.
When the oil view diffusion pump oil selection online becomes hot enough to vaporize, the oil vapors rise up the center of the pump and exit the nozzles at a downward angle. It performs well in tough, rugged applications and offers quick pumpdown, even after exposure to air at operating temperatures, although this is not recommended. The following vacuum data are based on a test bench. Vacuum diffusion pumps are one of the oldest and most reliable ways of creating a vacuum down to 1010 torr, or even lower, at 25 c. The diffusion pump is the most common type of pump for use in high vacuum applications. At this point, the vacuum diffusion pump takes over to create a. It can make the high vacuum pumping system with valves, watercooled baffle, pipelines, mechanical vacuum pump, etc, which can generate 102 pa104 pa working vacuum degree. The oil is condensed and falls down to the boiler carrying with it the gas molecules. Although its use has been mainly associated within the highvacuum range down to 10. Oil diffusion pump ulkpflpbl series pbl series oil. Agilent diffusion pumps offer high pumping speeds, high throughput, high tolerance forepressure, excellent backstreaming characteristics, low ultimate pressure, and longterm reliability.
When your process requires a pressure below that of a mechanical pump or mechanical pump and roots pump combination a. Please try again later or contact your customer service representative. Depending on the type of diffusion pump oil you use, maintenance can be relatively simple to very time consuming. Jun 21, 2016 operation, maintenance and troubleshooting of oil diffusion pumps oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable. The pumps have been designed for optimum heat transfer into the oil resulting in faster heat up times with a significant reduction in energy consumption. Aug 14, 2014 oil diffusion pumps remain in popular use in the vacuum heat treating industry, possibly one of the few applications remaining for this type of high vacuum pump in the western world. Because of its simplicity, high performance and low initial cost, the diffusion pump is the primary industrial high vacuum pumping mechanism. The excited gas travels upward and exits through the pressure jets that are pointed at an downward angle. Silicone based diffusion pump oil 500 cc, same as dc704. The pumping system consists of a housing 1, an eccentrically installed rotor 2, vanes that move radially under spring force 3 and the inlet andoutlet 4. This series has maximum pumping speed at 101pa range, where pumping speed of oil rotary pump or mechanical booster pump decreases.
Diffusion pumps are probably the most commonly used mechanisms for creating a high vacuum in industrial vacuum processing. Dow corning diffusion pump fluid inland vacuum industries, inc. Silicone based diffusion pump oil 100 cc, same as dc705. Oil apour diffusion pumps vapour pumps for industrial applications edwards has long been a pioneer of vapour pumps and diffusion pump technology with innovations such as the diffusion pump cold cap and the combined diffusion pump, the diffstak. The properties of diffusion pump oil have a great influence on the pumping performance of diffusion pump, so the basic requirements for diffusion pump oil are as follows. The reconditioning of silicone oil after contact with air at high temperatures is much faster compared to mineral oils. Supporting a broad range of industries requiring materials and services for nextgeneration product production. Dc 704 diffusion pump fluid fluid oil avt services. Dow corning diffusion pump fluids are designed for high vacuum and for fast pumping of large volumes of gas or vapor in production operations. A decade later, experimenters found that some oils had high.
Evp provide all kinds of rotary vacuum pumps such as direcdrive structure rotary vane vacuum pumps 2xz series, single stage oil sealed rotary vane vacuum pumps sv series, beltdrive rotary vane vacuum pumps 2xa series. When your process requires a pressure below that of a mechanical pump or mechanical pump and roots pump. It is very reliable and longlived, although when misused it can create a great deal of contamination in the processing chamber. Since the chamber itself has no moving parts aside from the oil droplets, a vacuum diffusion pump can operate with stability over long periods. Diffusion pump oil is not available in my country and also i cant bear the expense in importing of dp oil. The pump oil in the oil sump is heated to where it has an appreciable vapor pres sure and the. Kt series oil diffusion pump oil diffusion pumpvacuum pump. The main reasons for their continued use are their longevity the lack of other options. Genuine oil ulvoil d series was developed specific for oil diffusion pumps and b6 was designed specific for oil diffusion ejector pumps. Oil backflow the diffusion pump oil backflow is that amount of oil which enters the high vacuum chamber under the same operating conditions in a certain time unit. Oil diffusion pump vacuum pump evp vacuum solution. Final vacuum the hsgroup silicone diffusion pump oil oi808 achieves ultimate vacuums of 106 to 107 mbar thanks to its low vapor pressureprovided it complies with the regulations of uhv technology surfacetreated parts and metal or viton seals, and provides adequate heat output and sufficiently low prevacuum.
This article will explain practical steps that can be taken to ensure optimal performance of oil. Oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable and very durable. This cyclic process creates the pumping action of an oil diffusion pump. Backstreaming is the migration of minute levels of oil. Diffusion pump oil vacuum pump evp vacuum solution. Maintenance and troubleshooting of oil diffusion pumps agilent. Oil diffusion pumps oil diffusion pumps attain high vacuum, and are used as the exhaust system for a wide variety of vacuum processes such as vacuum heat treatment, vacuum evaporation, electric beam welding, and sputtering equipment. Using silicone based oil, there is little or no maintenance required. Figure 1 shows the crosssection of a typical oil diffusion pump. Oil diffusion pumps from leybold are ideally suited for industrial high vacuum applications. For pressures in high vacuum ranges, cooled baffles are not needed.
We meet customers needs with various lineup including 4 to 52 inch for oil diffusion pump and 2 to 20 inch for oil diffusion ejector pump. Has thermal stability and is resistant to oxidation. Operation, maintenance and troubleshooting of oil diffusion pumps. An oil diffusion pump is used to achieve higher vacuum lower pressure than is possible by use of positive displacement pumps alone.
Kt series oil diffusion pump oil diffusion pumpvacuum. Leybonol lvo 5xx diffusion pump oil leybold united states. Dow corning 702, 704, and 705 are thermally stable, oxidation resistant, and chemically inert silicone vacuum fluids that offer quick pumpdown and longer fluid life. Typical applications n vacuum coating n metallurgy n. Kt series oil diffusion vacuum pump are the equipment mainly used for getting the high vacuum 102 pa 105 pa condition. The pumping effect of these pumps is created through the diffusion of gases into an oil vapor stream. Oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable.
Supervac diffusion pump oil product information supervac. Hlt20 is a high quality, general purpose diffusion pump fluid which is double distilled from a straight petroleum hydrocarbon mineral oil to yield pure high viscosity oil for all types of diffusion pumps. The main reason for this is that turbomolecular vacuum pumps. They excel with superior vacuum performance and are reliable components in medium vacuum and high vacuum systems with a fit and form retrofit capability. As discussed in our article covering the difference between hydrocarbon based and silicone based diffusion pump oil, we generally recommend our customers use silicone based diffusion pump oil. Oil vapor diffusion pumps it wasnt that long ago when you could walk into any vacuum laboratory and find a vapor diffusion pump on every system.
The original diffusion pump fluid used was mercury, which could withstand elevated. Besides single pumps, welch also offers complete oil diffusion pump systems. The first designs of diffusion pumps go back to 1915, when the pump was invented by. Edwardss range of high throughput diffusion pumps have many advantages in industrial applications. The dij series of diffusion pumps is a 5stage oil diffusion pump with an improved gas throughput and stable high pressure in the range of 103 mbar. These vapor jet pumps are one of the oldest and most reliable ways to create a vacuum. Apr, 2017 this movie shows the function principles of the leybold oil diffusion pump dip. Instructions for glass oil diffusion pumps 924770, 924780. Oil diffusion pump ulvac has drawn on a wealth of experience in evacuation technology to redesign the oil diffusion pumps meeting the demands of a new era. Diffusion pumps differ from conventional mechanical pumps in that they use a high speed jet of fluid to direct gas molecules in the pump throat down to the bottom of the pump and out the exhaust, which is usually called the foreline. The first designs of diffusion pumps go back to 1915, when the pump was invented by irving langmuir. The rotary vane pump removes these compressed gas molecules at the exhaust port of the diffusion pump.
Mt704 diffusion pump fluid is a single component fluid for high vacuums of 10e6 to 10e8 torr, untrapped or 10e10 to 10e11, trapped. The oil jet with gas molecules hits the outer cooled shell of the oil diffusion pump. Oil diffusion ejector pumpy pbl series ulvacs oil diffusion pump has been used for many high vacuum equipments. Vacuum technologies d i f f u s i o n p u m p s vacuum furnaces vacuum furnace applications require pumps that are capable of achieving stable pressures in high gas flow environments. Brochures vacuum pumps, systems and solutions leybold.
Which widely used in metallurgy, chemical industry, vacuum coating machines, vacuum furnaces, food packaging machines etc. A vacuum diffusion pump cannot begin its work with full atmospheric pressure inside the chamber. The original diffusion pump fluid used was mercury, which could withstand elevated temperatures but had a. Performance of lion diffusion pump oil 11 corelationship between ultimate pressure temperature 1 pressure temperature relationship of lion diffusion pump oil a method. The ulvac diffusion pumps have been designed for outstanding performance and extremely low running costs. Silicone based diffusion pump oil 1 gallon, same as dc705. Aug 25, 2014 supervac tm svsigma fast diffusion pump oil. Vhs4 diffusion pump x draft 8702 explosion operation of the diffusion pump without continuous evacuation below 0. Vapor diffusion pumps were first conceived about 191516, and used mercury as. Instructions for glass oil diffusion pumps 924770, 924780, 924785, 924795 instruction sheet number 9247895. The vapor pressure and backstreaming rate of mt705 diffusion pump fluid are low enough that the use of traps or refrigeration may not be necessary for all ultrahigh and ultraclean vacuum applications. Agilent diffusion pumps are the best choice for developmental and production systems.
The pumping speed ranges from 2,400 ls to 33,000 ls and has a operating range of 101 to 107 mbar. Welldesigned vacuum systems can approach uhv pressure without ln 2 traps when using this fluid. Diffusion pump maintenance guide diffusion pump oil by. Oil diffusion pumps dij series leybold online shop. This is a silicone fluid manufactured specially for fast pumping of gasvapor from the system. These pumps have been designed for outstanding performance and extremely low running costs. Inland vacuums silicone diffusion pump oils invoil 702, 704, and 705 are durable fluids designed for a variety of high vacuum applications and for fast pumping large volumes of gas. Please let me know if you have any suggestions on how to. The indomet silicone oil for diffusion pumps can be alternatively used to the silicone oil dc 704, an 174, dc 705, an 175, and others. It is a significant improvement over all mineral diffusion pump oils like diffelen.
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